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We summarized The existing progress standing in the large-ability DUV laser both at the wavelength of FHG of the one-μm laser and at 193 nm. The modern progress with the reliable-state/fiber laser, as well as the nonlinear optical crystals, prompts not simply the typical ability but also the beam top quality (coherence) of your DUV lasers to an unparalleled level.
The average ability from the NIR laser continue to has the prospective to get enhanced to tens of watts such as 70 W [26] if the double-pass configuration might be used to the Yb:YAG SCF amplifier phase. Consequently, Should the conversion efficiency of 31% from NIR to DUV might be still maintained at this higher electricity condition, the typical output electric power of the DUV laser at 258 nm could be greater than 20 W, which might be considered a outstanding electric power level for your DUV laser and bring about the unanticipated DUV laser machining results. Furthermore, for prime-electrical power DUV laser, the UV destruction in the nonlinear crystal, such as the windows for CLBO crystal and the mirrors, is an additional important parameter for lasting and secure operation.
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Both of those the 1040 nm and 1078 nm laser originate from one particular dual-wavelength Yb-doped fiber laser. Every laser is amplified by stages of fiber amplifier and Yb-doped supplies amplifier, respectively.
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From the scientific and industrial apps, the beam excellent with the DUV laser is likewise a significant parameter. Specially, the beam excellent on the DUV laser drastically affects the laser machining results. The beam excellent on the DUV laser is decided by that of the elemental laser as well as the crystal for the frequency conversion. Not long ago, a superior-electricity DUV laser (>ten W) at 258 nm was documented with a beam good quality of M2 < one.5, which was produced by FHG of the Yb:YAG laser at 1030 nm using the CLBO crystal [13]. This laser would bring on a better laser machining end result in comparison to the preceding DUV lasers with larger sized M2.
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What's more, combining the sound-point out laser with other nonlinear process for example stimulated Raman scattering, NIR lasers might be reached at new wavelengths with high energy and substantial beam high-quality, which was analyzed from the proof-of-principle experiment. This Raman laser scheme gives a brand new route to the large-electricity DUV laser, Specially within the wavelength of 193 nm.
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The conversion effectiveness from fundamental NIR to DUV is from five% to 36% according to the claimed ends in Desk one. Increasing the conversion effectiveness will reduce the load on the look and setup of the elemental laser amplifier plus the electric powered electricity use. A great beam excellent of the fundamental laser will even lead into the growing on the conversion performance as well as the appropriate electrical power intensity on the NIR and inexperienced laser from the SHG and FHG read more system, respectively. The best conversion efficiencies from NIR to environmentally friendly and environmentally friendly to DUV laser by usage of CLBO crystal are 70% and all-around fifty%, respectively [twelve], which corresponds on the conversion effectiveness of 35% from fundamental to DUV.
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